What are the common spectral detection techniques and their applications?
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1. Fourier transform infrared spectroscopy (FTIR) : used to detect the chemical composition and molecular structure of the chip material, by analyzing the absorption spectrum of infrared light, identify specific functional groups, and judge the type and purity of the material
2. Raman spectroscopy : a non-destructive testing technique to obtain molecular vibration information of a material by analyzing the energy change after photon scattering, suitable for quality control of semiconductor materials
3. Ultraviolet-visible spectroscopy (UV-Vis) : Evaluation of the light absorption properties of the chip surface, detection of contaminants, oxide thickness, and other surface properties
4. Fluorescence spectroscopy : Detects certain elements or compounds on the chip and identifies trace impurities by the specific wavelengths of light emitted after excitation
5. Near infrared spectroscopy (NIR) ： measures the concentration and composition of a material and is often used to detect chemicals with specific absorption peaks in the near infrared region
